Browse Standards

硅片弯曲度测试方法

Test methods for bow of silicon wafers

硅片翘曲度非接触式测试方法

Test method for measuring warp on silicon slices by noncontact scanning

低温傅立叶变换红外光谱法测量硅单晶中III、V族杂质含量的测试方法

Test method for low temperature FT-IR analysis of single crystal silicon for Ⅲ-Ⅴ impurities

重掺n型硅衬底中硼沾污的二次离子质谱检测方法

Test method for measuring boron contamination in heavily doped n-type silicon substrates by secondary ion mass spectrometry

酸浸取 原子吸收光谱法测定多晶硅表面金属污染物

Test method for measuring surface metal contamination of polycrystalline silicon by acid extraction-atomic absorption spectroscopy

热解吸气相色谱法测定硅片表面的有机污染物

Test methods for analyzing organic contaminants on silicon wafer surfaces by thermal desorption gas chromatography

高分辩率X射线衍射测量GaAs衬底生长的AlGaAs中Al成分的试验方法

Test method for measuring the Al fraction in AlGaAs on GaAs substrates by high resolution X-ray diffraction

硅和外延片表面Na、Al、K和Fe的二次离子质谱检测方法

Test method for measuring surface sodium,aluminum,potassium,and iron on silicon and epi substrates by secondary ion mass spectrometry

硅单晶中Ⅲ-Ⅴ族杂质的光致发光测试方法

Test methods for photoluminescence analysis of single crystal silicon for III-V impurities

硅中代位碳原子含量 红外吸收测量方法

Test method for substitutional atomic carbon concent of silicon by infrared absorption

硅单晶电阻率测定方法

Test method for measuring resistivity of monocrystal silicon

硅晶体中间隙氧含量径向变化测量方法

Testing method for determination of radial interstitial oxygen variation in silicon

硅片参考面结晶学取向X射线测试方法

Method for measuring crystallographic orientation of flats on single-crystal silicon slices and wafers by X-ray techniques

硅及其他电子材料晶片参考面长度测量方法

Test method for measuring flat length wafers of silicon and other electronic materials

炭素材料显气孔率的测定方法

Carbon materials-determination of open porosity

炭素材料体积密度测定方法

Carbon materials-determination method of the bulk density

炭素材料内在水分的测定

Carbon materials-determination moisture in air-dried sample

炭素材料全硫含量测定方法

Carbon materials-determination of the total sulphur content

炭素材料电阻率测定方法

Method for determination of specific resistance of carbon materials

硅抛光片表面质量目测检验方法

Standard method for measuring the surface quality of polished silicon slices by visual inspection