GB/T 16596-1996

Abolished

Specification for establishing a wafer coordinatesystem

确定晶片坐标系规范

Standard Type

GBT

ICS

29.045

CCS

H21

Status

Abolished

Issue Date

1996-11-04

Implementation

1997-04-01

Centralized Committee

国家标准委

Issuing Authority

国家技术监督局

Application Summary AI generated

This standard specifies the coordinate system for defining locations on semiconductor wafers, including the origin, axes orientation, and notation for wafer flats or notches. It is applied in the semiconductor industry for wafer mapping, defect tracking, and process alignment during fabrication, testing, and inspection. The standard ensures consistent communication of wafer positions across manufacturing equipment and quality control systems.

Related Standards

GB/T 12964-2003 Monocrystalline silicon polished wafers GB/T 16595-1996 Specification for a universal wafer grid GB/T 12965-2005 Monocrystalline silicon as cut slices and lapped slices GB/T 20230-2006 Indium phosphide single crystal GB/T 20229-2006 Gallium phosphide single crystal GB/T 20228-2006 Gallium arsenide single crystal GB/T 11071-2006 Zone-refined germanium ingot GB/T 11070-2006 Reduced germanium ingot

Transparency note: The application summary and key sentences on this page were automatically generated by AI from the standard's original text. This content has not been human-verified and should not be used for compliance or regulatory purposes. Always refer to the official standard document from the issuing authority.