GB/T 12964-2003

Abolished

Monocrystalline silicon polished wafers

硅单晶抛光片

Standard Type
GBT
ICS
29.045
CCS
H82
Status
Abolished
Issue Date
2003-06-16
Implementation
2004-01-01
Centralized Committee
国家标准委
Issuing Authority
中华人民共和国国家质量监督检验检疫总局

Application Summary AI generated

GB/T 12964-2003 specifies the technical requirements, test methods, inspection rules, and packaging for monocrystalline silicon polished wafers used in semiconductor device fabrication. It applies to the production and quality control of polished silicon wafers with diameters up to 200 mm, serving as a key reference for manufacturers and users in the electronics industry. This standard ensures consistent wafer flatness, surface quality, and electrical properties critical for integrated circuit and discrete device manufacturing.

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Transparency note: The application summary and key sentences on this page were automatically generated by AI from the standard's original text. This content has not been human-verified and should not be used for compliance or regulatory purposes. Always refer to the official standard document from the issuing authority.