GB/T 13389-2014

Active

Practice for conversion between resistivity and dopant density for boron-doped, phosphorus-doped, and arsenic-doped silicon

掺硼掺磷掺砷硅单晶电阻率与掺杂剂浓度换算规程

Standard Type
GBT
ICS
29.045
CCS
H80
Status
Active
Issue Date
2014-12-31
Implementation
2015-09-01
Centralized Committee
国家标准委
Issuing Authority
中华人民共和国国家质量监督检验检疫总局、中国国家标准化管理委员会

Application Summary AI generated

This standard provides a conversion practice between resistivity and dopant density for boron-doped, phosphorus-doped, and arsenic-doped silicon single crystals. It is applied in the semiconductor industry for quality control and material characterization of silicon wafers used in integrated circuit and solar cell manufacturing. The standard ensures accurate doping level determination from resistivity measurements, critical for device performance and process consistency.

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Transparency note: The application summary and key sentences on this page were automatically generated by AI from the standard's original text. This content has not been human-verified and should not be used for compliance or regulatory purposes. Always refer to the official standard document from the issuing authority.