GB/T 7774-2007
ActiveVacuum technology -Turbomolecular pumps - Measurement of performance characteristics
真空技术 涡轮分子泵性能参数的测量
Application Summary AI generated
This standard specifies the methods for measuring the performance characteristics of turbomolecular pumps, including pumping speed, compression ratio, and ultimate pressure. It is applied in the vacuum technology industry for testing and qualifying pumps used in semiconductor manufacturing, scientific research, and high-vacuum coating processes. The standard ensures consistent and comparable performance data across different pump models and manufacturers.
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Transparency note: The application summary and key sentences on this page were automatically generated by AI from the standard's original text. This content has not been human-verified and should not be used for compliance or regulatory purposes. Always refer to the official standard document from the issuing authority.