GB/T 11164-1999
AbolishedVacuum coating plant generic specification
真空镀膜设备通用技术条件
Application Summary AI generated
This standard specifies the technical requirements, test methods, inspection rules, and marking/packaging for vacuum coating plants. It is applied in the manufacturing and quality verification of equipment used for physical vapor deposition (PVD) processes, such as evaporative and sputtering coating systems. The standard ensures performance consistency and reliability in industries like optics, electronics, and decorative coatings.
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Terminology for vacuum technology
Transparency note: The application summary and key sentences on this page were automatically generated by AI from the standard's original text. This content has not been human-verified and should not be used for compliance or regulatory purposes. Always refer to the official standard document from the issuing authority.