GB/T 18193-2000
ActiveVacuum technology--Mass-spectrometer-type leak detector calibration
真空技术 质谱检漏仪校准
Application Summary AI generated
This standard specifies the calibration methods for mass-spectrometer-type leak detectors used in vacuum technology. It is applied in industrial and laboratory settings to ensure accurate measurement of leak rates in sealed vacuum systems, such as those in semiconductor manufacturing, aerospace components, and refrigeration equipment. The standard defines procedures for calibrating the detector's sensitivity and response to standard leaks, ensuring reliable performance in quality control and maintenance testing.
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Transparency note: The application summary and key sentences on this page were automatically generated by AI from the standard's original text. This content has not been human-verified and should not be used for compliance or regulatory purposes. Always refer to the official standard document from the issuing authority.