GB/T 3164-1993
AbolishedVacuum technology--Graphical symbols
真空技术系统图用图形符号
Application Summary AI generated
This standard defines graphical symbols used in schematic diagrams for vacuum technology systems. It is applied in engineering design, manufacturing, and maintenance of vacuum equipment across industries such as semiconductor fabrication, coating, and scientific research. The symbols enable clear, standardized communication of system components like pumps, valves, and gauges in technical drawings and documentation.
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GB/T 3163-1993
Terminology for vacuum technology
Transparency note: The application summary and key sentences on this page were automatically generated by AI from the standard's original text. This content has not been human-verified and should not be used for compliance or regulatory purposes. Always refer to the official standard document from the issuing authority.