GB/T 46081-2025
ActiveVacuum technology—Vacuum gauges—Specifications, calibration and measurement uncertainties for spinning rotor gauges
真空技术 真空计 磁悬浮转子真空计的规范、校准和测量不确定度
Application Summary AI generated
This standard specifies the technical requirements, calibration procedures, and methods for evaluating measurement uncertainties specific to spinning rotor vacuum gauges. It is applied in industrial and laboratory vacuum systems where precise medium-to-high vacuum measurements (typically from 10⁻¹ to 10⁻⁵ Pa) are required, such as in semiconductor manufacturing, thin-film deposition, and vacuum coating processes. The standard ensures consistent performance and traceable calibration for these gauges, supporting quality control and process repeatability.
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Transparency note: The application summary and key sentences on this page were automatically generated by AI from the standard's original text. This content has not been human-verified and should not be used for compliance or regulatory purposes. Always refer to the official standard document from the issuing authority.