GB/T 45856-2025
ActiveVacuum technology—Vacuum gauges—Specifications, calibration and measurement uncertainties for Pirani gauges
真空技术 真空计 皮拉尼真空计的规范、校准和测量不确定度
Application Summary AI generated
This standard specifies the technical requirements, calibration procedures, and methods for evaluating measurement uncertainties specific to Pirani vacuum gauges. It is applied in industries such as semiconductor manufacturing, vacuum coating, and scientific research where accurate pressure measurement in the medium-to-low vacuum range (typically 0.1 Pa to 100 kPa) is critical. The standard ensures consistency and reliability in gauge performance for quality control, process monitoring, and equipment validation.
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Transparency note: The application summary and key sentences on this page were automatically generated by AI from the standard's original text. This content has not been human-verified and should not be used for compliance or regulatory purposes. Always refer to the official standard document from the issuing authority.