GB/T 43916-2024
ActiveVacuum technology—Vacuum gauges—Specifications, calibration and measurement uncertainties for capacitance diaphragm gauges
真空技术 真空计 电容薄膜真空计的规范、校准和测量不确定度
Application Summary AI generated
This standard specifies the technical specifications, calibration procedures, and measurement uncertainty evaluation for capacitance diaphragm gauges used in vacuum technology. It is applied in industries requiring precise low-pressure measurements, such as semiconductor manufacturing, thin-film deposition, and vacuum coating processes, where accurate pressure readings are critical for process control and quality assurance. The standard also provides guidelines for calibration laboratories to ensure traceability and consistency in vacuum gauge performance.
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Transparency note: The application summary and key sentences on this page were automatically generated by AI from the standard's original text. This content has not been human-verified and should not be used for compliance or regulatory purposes. Always refer to the official standard document from the issuing authority.