GB/T 42604-2023
ActiveVacuum technology—Vacuum gauges—Specifications for hot cathode ionization gauges
真空技术 真空计 热阴极电离真空计规范
Application Summary AI generated
This standard specifies the technical requirements, test methods, and calibration procedures for hot cathode ionization gauges used in vacuum technology. It is applied in industrial and laboratory settings where precise measurement of high and ultra-high vacuum pressures is required, such as in semiconductor manufacturing, thin-film deposition, and particle accelerator systems. The standard ensures consistent performance and accuracy across different gauge models for quality control and system monitoring.
Related Standards
GB/T 4983-2003
Vacuum technology--Quick release couplings--Dimensions--Part 2:Screwed type
GB/T 4982-2003
Vacuum technology--Quick release couplings--Dimensions--Part 1:Clamped type
GB/Z 25756-2010
Vacuum technology - Bakable flanges - Dimensions of knife-edge flanges
GB/Z 42625-2023
Vacuum technology—Vacuum gauges—Characterization of quadrupole mass spectrometers for partial pressure measurement
GB/Z 42624-2023
Vacuum technology—Vacuum gauges—Procedures to measure and report outgassing rates
GB/T 18193-2000
Vacuum technology--Mass-spectrometer-type leak detector calibration
GB/T 11164-1999
Vacuum coating plant generic specification
GB/T 3164-1993
Vacuum technology--Graphical symbols
Transparency note: The application summary and key sentences on this page were automatically generated by AI from the standard's original text. This content has not been human-verified and should not be used for compliance or regulatory purposes. Always refer to the official standard document from the issuing authority.