GB/T 40418-2021

Active

Electronic specialty gas—Fluoromethane

电子特气氟甲烷

Standard Type

GBT

ICS

71.100.20

CCS

G86

Status

Active

Issue Date

2021-08-20

Implementation

2022-03-01

Centralized Committee

国家标准委

Issuing Authority

国家市场监督管理总局、中国国家标准化管理委员会

Application Summary AI generated

This standard specifies the technical requirements, test methods, inspection rules, and packaging, marking, storage, and transportation conditions for fluoromethane used as an electronic specialty gas. It is applied in the semiconductor and microelectronics industries, specifically for processes such as plasma etching and chemical vapor deposition (CVD) chamber cleaning, where high-purity fluoromethane is required to ensure manufacturing precision and yield.

Related Standards

QB/T 2485-2008 Toilet soap QB/T 1793-2006 Natural menthol QB/T 2317-2007 Natural Calcium Carbonate for Toothpaste QB/T 2477-2007 Dicalcium phosphate dihydrate for toothpaste QB/T 2486-2008 Laundry bar soap HG/T 4232-2011 Oleamide HG/T 4228-2011 polyurethane chain extender HQEE HG/T 4246-2011 2,5-Dichloronitrobenzene

Transparency note: The application summary and key sentences on this page were automatically generated by AI from the standard's original text. This content has not been human-verified and should not be used for compliance or regulatory purposes. Always refer to the official standard document from the issuing authority.