GB/T 40417-2021
ActiveElectronic specialty gas—1,3-Hexafluorobutadiene
电子特气 六氟丁二烯
Application Summary AI generated
This standard specifies the technical requirements, test methods, inspection rules, and packaging, marking, storage, and transportation conditions for 1,3-hexafluorobutadiene used as an electronic specialty gas. It is applied in the semiconductor and microelectronics industries, specifically for plasma etching processes in the manufacturing of integrated circuits and other electronic devices. The standard ensures the purity and quality of the gas for consistent and reliable performance in high-precision etching applications.
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Transparency note: The application summary and key sentences on this page were automatically generated by AI from the standard's original text. This content has not been human-verified and should not be used for compliance or regulatory purposes. Always refer to the official standard document from the issuing authority.