GB/T 40417-2021

Active

Electronic specialty gas—1,3-Hexafluorobutadiene

电子特气 六氟丁二烯

Standard Type
GBT
ICS
71.100.20
CCS
G86
Status
Active
Issue Date
2021-08-20
Implementation
2022-03-01
Centralized Committee
国家标准委
Issuing Authority
国家市场监督管理总局、中国国家标准化管理委员会

Application Summary AI generated

This standard specifies the technical requirements, test methods, inspection rules, and packaging, marking, storage, and transportation conditions for 1,3-hexafluorobutadiene used as an electronic specialty gas. It is applied in the semiconductor and microelectronics industries, specifically for plasma etching processes in the manufacturing of integrated circuits and other electronic devices. The standard ensures the purity and quality of the gas for consistent and reliable performance in high-precision etching applications.

Related Standards

Transparency note: The application summary and key sentences on this page were automatically generated by AI from the standard's original text. This content has not been human-verified and should not be used for compliance or regulatory purposes. Always refer to the official standard document from the issuing authority.