GB/T 40344.4-2025
ActiveVacuum technology—Standard methods for measuring vacuum-pump performance—Part 4: Turbomolecular vacuum pumps
真空技术 真空泵性能测量标准方法 第4部分：涡轮分子泵
Application Summary AI generated
This standard specifies the measurement methods for key performance parameters of turbomolecular vacuum pumps, including pumping speed, compression ratio, and ultimate pressure. It is applied in industries such as semiconductor manufacturing, scientific research, and vacuum coating, where precise high-vacuum or ultra-high-vacuum conditions are required. The standard ensures consistent testing procedures for evaluating pump performance under defined conditions, facilitating quality control and system design.
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Transparency note: The application summary and key sentences on this page were automatically generated by AI from the standard's original text. This content has not been human-verified and should not be used for compliance or regulatory purposes. Always refer to the official standard document from the issuing authority.