GB/T 40333-2021
ActiveVacuum gauges—Definitions and specifications for quadrupole mass spectrometers
真空计 四极质谱仪的定义与规范
Application Summary AI generated
This standard defines terminology and specifies performance parameters for quadrupole mass spectrometers used as vacuum gauges. It is applied in industries requiring precise residual gas analysis and partial pressure measurement, such as semiconductor manufacturing, thin-film deposition, and high-energy physics research. The standard ensures consistent specifications for instruments that monitor vacuum quality in sealed chambers and process equipment.
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Transparency note: The application summary and key sentences on this page were automatically generated by AI from the standard's original text. This content has not been human-verified and should not be used for compliance or regulatory purposes. Always refer to the official standard document from the issuing authority.