GB/T 38866-2020

Active

Dichlorosilane for electronic industry

电子工业用二氯硅烷

Standard Type

GBT

ICS

71.100.20

CCS

G86

Status

Active

Issue Date

2020-07-21

Implementation

2021-02-01

Centralized Committee

国家标准委

Issuing Authority

国家市场监督管理总局、中国国家标准化管理委员会

Application Summary AI generated

This standard specifies the technical requirements, test methods, inspection rules, and packaging for dichlorosilane used in the electronic industry. It is applied in the production of high-purity silicon thin films and epitaxial layers for semiconductor devices, particularly in chemical vapor deposition processes. The standard ensures the gas meets the stringent purity and impurity limits required for advanced integrated circuit manufacturing.

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Transparency note: The application summary and key sentences on this page were automatically generated by AI from the standard's original text. This content has not been human-verified and should not be used for compliance or regulatory purposes. Always refer to the official standard document from the issuing authority.