GB/T 38386-2019
ActiveGas analysis—Determination of oxynitride in gases—The method of Cavity Ring-Down Spectroscopy
气体分析 气体中氮氧化物的测定 光腔衰荡光谱法
Application Summary AI generated
This standard specifies the use of Cavity Ring-Down Spectroscopy (CRDS) for measuring nitrogen oxides (oxynitrides) in high-purity gases. It is primarily applied in the chemical and electronics industries for quality control of specialty gases, such as those used in semiconductor manufacturing or gas cylinder filling, where trace levels of NOx must be precisely quantified to ensure product purity and process reliability.
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Transparency note: The application summary and key sentences on this page were automatically generated by AI from the standard's original text. This content has not been human-verified and should not be used for compliance or regulatory purposes. Always refer to the official standard document from the issuing authority.