GB/T 36656-2018

GB/T 36656-2018 specifies the technical requirements, test methods, inspection rules, and packaging for electronic grade triethylgallium, a high-purity organometallic compound used as a precursor in metal-organic chemical vapor deposition (MOCVD). It is applied in the semiconductor industry for producing compound semiconductor materials such as gallium nitride (GaN) and gallium arsenide (GaAs), which are essential for manufacturing LEDs, laser diodes, and high-frequency electronic devices. The standard ensures consistent purity and quality control for this critical chemical in thin-film deposition processes.