GB/T 36653-2018

Active

Electronic grade trimethylaluminium

电子级三甲基铝

Standard Type

GBT

ICS

71.100.20

CCS

G86

Status

Active

Issue Date

2018-09-17

Implementation

2019-01-01

Centralized Committee

国家标准委

Issuing Authority

国家市场监督管理总局、中国国家标准化管理委员会

Application Summary AI generated

GB/T 36653-2018 specifies the technical requirements, test methods, inspection rules, and packaging for electronic grade trimethylaluminium, a high-purity chemical used as a precursor in metal-organic chemical vapor deposition (MOCVD) processes. It is applied in the semiconductor and optoelectronics industries for producing compound semiconductor materials like gallium nitride (GaN) and aluminum gallium nitride (AlGaN) in LED and power device manufacturing. The standard ensures consistent purity and quality control for this critical raw material in thin-film deposition applications.

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Transparency note: The application summary and key sentences on this page were automatically generated by AI from the standard's original text. This content has not been human-verified and should not be used for compliance or regulatory purposes. Always refer to the official standard document from the issuing authority.