GB/T 36176-2018
ActiveVacuum technology—Vacuum leak testing method by helium mass spectrometer
真空技术 氦质谱真空检漏方法
Application Summary AI generated
This standard specifies the method for detecting leaks in vacuum systems and components using a helium mass spectrometer. It is applied in industries such as semiconductor manufacturing, aerospace, and vacuum coating to ensure the integrity of vacuum chambers, pipelines, and sealed devices. The testing procedure involves pressurizing the object with helium and measuring the gas escaping through leaks to locate and quantify leakage rates.
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Transparency note: The application summary and key sentences on this page were automatically generated by AI from the standard's original text. This content has not been human-verified and should not be used for compliance or regulatory purposes. Always refer to the official standard document from the issuing authority.