GB/T 35049-2018
ActiveVacuum technology—Leak testing method by quadrupole mass spectrometer
真空技术 四极质谱检漏方法
Application Summary AI generated
This standard specifies the procedures for using a quadrupole mass spectrometer to detect and locate leaks in vacuum systems and components. It is applied in industries such as semiconductor manufacturing, aerospace, and vacuum coating, where maintaining ultra-high vacuum integrity is critical. The method is used for quality control and maintenance testing of vacuum chambers, pipelines, and sealed devices.
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Vacuum technology--Graphical symbols
Transparency note: The application summary and key sentences on this page were automatically generated by AI from the standard's original text. This content has not been human-verified and should not be used for compliance or regulatory purposes. Always refer to the official standard document from the issuing authority.