GB/T 34091-2017

Active

Gas for electronic industry—Hexafluoroethane

电子工业用气体六氟乙烷

Standard Type

GBT

ICS

71.100.20

CCS

G86

Status

Active

Issue Date

2017-07-31

Implementation

2017-11-01

Centralized Committee

国家标准委

Issuing Authority

中华人民共和国国家质量监督检验检疫总局、中国国家标准化管理委员会

Application Summary AI generated

This standard specifies the technical requirements, test methods, inspection rules, and packaging, marking, storage, and transportation conditions for hexafluoroethane (C₂F₆) used in the electronics industry. It is applied as a high-purity etching and cleaning gas in semiconductor manufacturing, specifically for plasma etching and chemical vapor deposition (CVD) chamber cleaning processes. The standard ensures consistent purity and safety for critical microfabrication steps in integrated circuit and flat panel display production.

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Transparency note: The application summary and key sentences on this page were automatically generated by AI from the standard's original text. This content has not been human-verified and should not be used for compliance or regulatory purposes. Always refer to the official standard document from the issuing authority.