GB/T 34085-2017
ActiveGas for electronic industry—Trifluoromethane
电子工业用气体 三氟甲烷
Application Summary AI generated
GB/T 34085-2017 specifies the technical requirements, test methods, inspection rules, and packaging for trifluoromethane (CHF₃) used as an etching gas in the semiconductor and electronic industry. It is applied in the manufacturing of integrated circuits and flat-panel displays, where high-purity trifluoromethane is essential for plasma etching processes to ensure precise pattern transfer and device performance. The standard also governs quality control during production, storage, and transportation to maintain gas purity and safety in cleanroom environments.
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Transparency note: The application summary and key sentences on this page were automatically generated by AI from the standard's original text. This content has not been human-verified and should not be used for compliance or regulatory purposes. Always refer to the official standard document from the issuing authority.