GB/T 34085-2017

Active

Gas for electronic industry—Trifluoromethane

电子工业用气体 三氟甲烷

Standard Type
GBT
ICS
71.100.20
CCS
G86
Status
Active
Issue Date
2017-07-31
Implementation
2017-11-01
Centralized Committee
国家标准委
Issuing Authority
中华人民共和国国家质量监督检验检疫总局、中国国家标准化管理委员会

Application Summary AI generated

GB/T 34085-2017 specifies the technical requirements, test methods, inspection rules, and packaging for trifluoromethane (CHF₃) used as an etching gas in the semiconductor and electronic industry. It is applied in the manufacturing of integrated circuits and flat-panel displays, where high-purity trifluoromethane is essential for plasma etching processes to ensure precise pattern transfer and device performance. The standard also governs quality control during production, storage, and transportation to maintain gas purity and safety in cleanroom environments.

Related Standards

Transparency note: The application summary and key sentences on this page were automatically generated by AI from the standard's original text. This content has not been human-verified and should not be used for compliance or regulatory purposes. Always refer to the official standard document from the issuing authority.