GB/T 32386-2015
ActiveGases for electronic industry—Tungsten hexaflouride
电子工业用气体 六氟化钨
Application Summary AI generated
GB/T 32386-2015 specifies the technical requirements, test methods, inspection rules, and packaging for tungsten hexafluoride gas used in the electronics industry. It is applied in the production of semiconductor integrated circuits and flat-panel displays, where high-purity tungsten hexafluoride is essential for chemical vapor deposition (CVD) processes to form tungsten metal layers. The standard ensures consistent gas quality for reliable thin-film deposition in microelectronics manufacturing.
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Transparency note: The application summary and key sentences on this page were automatically generated by AI from the standard's original text. This content has not been human-verified and should not be used for compliance or regulatory purposes. Always refer to the official standard document from the issuing authority.