GB/T 32386-2015

Active

Gases for electronic industry—Tungsten hexaflouride

电子工业用气体 六氟化钨

Standard Type
GBT
ICS
71.100.20
CCS
G86
Status
Active
Issue Date
2015-12-31
Implementation
2016-07-01
Centralized Committee
国家标准委
Issuing Authority
中华人民共和国国家质量监督检验检疫总局、中国国家标准化管理委员会

Application Summary AI generated

GB/T 32386-2015 specifies the technical requirements, test methods, inspection rules, and packaging for tungsten hexafluoride gas used in the electronics industry. It is applied in the production of semiconductor integrated circuits and flat-panel displays, where high-purity tungsten hexafluoride is essential for chemical vapor deposition (CVD) processes to form tungsten metal layers. The standard ensures consistent gas quality for reliable thin-film deposition in microelectronics manufacturing.

Related Standards

Transparency note: The application summary and key sentences on this page were automatically generated by AI from the standard's original text. This content has not been human-verified and should not be used for compliance or regulatory purposes. Always refer to the official standard document from the issuing authority.