GB/T 32293-2015

This standard provides guidance on selecting appropriate leak detection methods for vacuum equipment, covering techniques such as pressure rise, helium mass spectrometry, and halogen leak testing. It is applied in industries like semiconductor manufacturing, aerospace, and scientific research where vacuum integrity is critical, helping engineers choose the most effective test based on equipment type, required sensitivity, and operational conditions. The standard ensures consistent and reliable leak testing procedures across design, production, and maintenance phases of vacuum systems.