GB/T 32292-2015
ActiveVacuum techology—Ferrofluid rotary feedthroughs—Generic specification
真空技术 磁流体动密封件 通用技术条件
Application Summary AI generated
This standard specifies the technical requirements, test methods, inspection rules, and marking/packaging for ferrofluid rotary feedthroughs used in vacuum systems. It is applied in industries requiring vacuum-tight rotary motion transmission, such as semiconductor manufacturing, vacuum coating equipment, and scientific research instruments. The standard ensures reliable sealing performance and durability under specified vacuum conditions and rotational speeds.
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Transparency note: The application summary and key sentences on this page were automatically generated by AI from the standard's original text. This content has not been human-verified and should not be used for compliance or regulatory purposes. Always refer to the official standard document from the issuing authority.