GB/T 32218-2015
ActiveVacuum technology—Test methods for leak rates of vacuum system
真空技术 真空系统漏率测试方法
Application Summary AI generated
This standard specifies test methods for measuring leak rates in vacuum systems, including procedures for both static and dynamic testing. It is applied in industries such as semiconductor manufacturing, aerospace, and scientific research to ensure vacuum integrity and performance of equipment like vacuum chambers, pipelines, and valves. The standard is used during system commissioning, maintenance, and quality control to detect and quantify leaks that could compromise vacuum levels.
Related Standards
GB/T 4983-2003
Vacuum technology--Quick release couplings--Dimensions--Part 2:Screwed type
GB/T 4982-2003
Vacuum technology--Quick release couplings--Dimensions--Part 1:Clamped type
GB/Z 25756-2010
Vacuum technology - Bakable flanges - Dimensions of knife-edge flanges
GB/Z 42625-2023
Vacuum technology—Vacuum gauges—Characterization of quadrupole mass spectrometers for partial pressure measurement
GB/Z 42624-2023
Vacuum technology—Vacuum gauges—Procedures to measure and report outgassing rates
GB/T 18193-2000
Vacuum technology--Mass-spectrometer-type leak detector calibration
GB/T 11164-1999
Vacuum coating plant generic specification
GB/T 3164-1993
Vacuum technology--Graphical symbols
Transparency note: The application summary and key sentences on this page were automatically generated by AI from the standard's original text. This content has not been human-verified and should not be used for compliance or regulatory purposes. Always refer to the official standard document from the issuing authority.