GB/T 31987-2015
ActiveGas for electronic industry—Germane
电子工业用气体 锗烷
Application Summary AI generated
GB/T 31987-2015 specifies the technical requirements, test methods, inspection rules, and packaging for germane gas used in the electronics industry. It is applied in the production of semiconductor materials, particularly for chemical vapor deposition (CVD) processes to deposit germanium-containing thin films in integrated circuits and optoelectronic devices. The standard ensures purity and safety compliance for germane as a critical doping or epitaxial gas in high-tech manufacturing environments.
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Transparency note: The application summary and key sentences on this page were automatically generated by AI from the standard's original text. This content has not been human-verified and should not be used for compliance or regulatory purposes. Always refer to the official standard document from the issuing authority.