GB/T 31986-2015
ActiveGas for electronic industry—Perfluoropropane
电子工业用气体 八氟丙烷
Application Summary AI generated
GB/T 31986-2015 specifies the technical requirements, test methods, inspection rules, and packaging for perfluoropropane (C3F8) used in the electronics industry. It is applied in semiconductor manufacturing, particularly for plasma etching and chemical vapor deposition (CVD) chamber cleaning, where high-purity gas is critical to prevent contamination. This standard ensures consistent quality control for suppliers and users in the production of integrated circuits and flat-panel displays.
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Transparency note: The application summary and key sentences on this page were automatically generated by AI from the standard's original text. This content has not been human-verified and should not be used for compliance or regulatory purposes. Always refer to the official standard document from the issuing authority.