GB/T 3164-2007
ActiveVacuum technology - Graphical symbols
真空技术 图形符号
Application Summary AI generated
This standard specifies a set of graphical symbols used in schematic diagrams for vacuum technology systems. It is applied in engineering design, technical documentation, and equipment manuals across industries such as semiconductor manufacturing, coating, and scientific research to ensure clear and consistent representation of vacuum components like pumps, valves, and gauges.
Related Standards
GB/T 4983-2003
Vacuum technology--Quick release couplings--Dimensions--Part 2:Screwed type
GB/T 4982-2003
Vacuum technology--Quick release couplings--Dimensions--Part 1:Clamped type
GB/Z 25756-2010
Vacuum technology - Bakable flanges - Dimensions of knife-edge flanges
GB/Z 42625-2023
Vacuum technology—Vacuum gauges—Characterization of quadrupole mass spectrometers for partial pressure measurement
GB/Z 42624-2023
Vacuum technology—Vacuum gauges—Procedures to measure and report outgassing rates
GB/T 18193-2000
Vacuum technology--Mass-spectrometer-type leak detector calibration
GB/T 11164-1999
Vacuum coating plant generic specification
GB/T 3164-1993
Vacuum technology--Graphical symbols
Transparency note: The application summary and key sentences on this page were automatically generated by AI from the standard's original text. This content has not been human-verified and should not be used for compliance or regulatory purposes. Always refer to the official standard document from the issuing authority.