GB/T 3163-1993
AbolishedTerminology for vacuum technology
真空技术术语
Application Summary AI generated
This standard defines the terminology used in vacuum technology, covering terms for vacuum pumps, gauges, systems, and related components. It is applied in engineering, manufacturing, and research contexts where vacuum systems are designed, operated, or tested, such as in semiconductor fabrication, coating processes, and scientific instrumentation. The standard ensures consistent communication and technical documentation across industries using vacuum technology.
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