GB/T 3163-2024
ActiveVacuum technology—Vocabulary
真空技术 术语
Application Summary AI generated
This standard defines the terminology used in vacuum technology, covering terms related to vacuum pumps, gauges, systems, and associated processes. It is applied in industries such as semiconductor manufacturing, thin-film coating, and scientific research to ensure consistent communication and documentation among engineers, designers, and procurement professionals. The standard is particularly relevant for specifying equipment, interpreting technical manuals, and conducting quality assurance in vacuum system design and testing.
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Transparency note: The application summary and key sentences on this page were automatically generated by AI from the standard's original text. This content has not been human-verified and should not be used for compliance or regulatory purposes. Always refer to the official standard document from the issuing authority.