GB/T 26251-2010

Abolished

Fluorine and mixed gases of fluorine-nitrogen

氟及氟氮混合气

Standard Type

GBT

ICS

71.100.20

CCS

G86

Status

Abolished

Issue Date

2011-01-14

Implementation

2011-05-01

Centralized Committee

国家标准委

Issuing Authority

中华人民共和国国家质量监督检验检疫总局、中国国家标准化管理委员会

Application Summary AI generated

GB/T 26251-2010 specifies the technical requirements, test methods, inspection rules, and safety packaging for fluorine gas and fluorine-nitrogen mixed gases. It is applied in the chemical and electronics industries, particularly for semiconductor manufacturing, where high-purity fluorine mixtures are used in etching and chamber cleaning processes. The standard ensures consistent gas composition and purity for safe handling and precise process control.

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Transparency note: The application summary and key sentences on this page were automatically generated by AI from the standard's original text. This content has not been human-verified and should not be used for compliance or regulatory purposes. Always refer to the official standard document from the issuing authority.