GB/T 26250-2010
AbolishedGases for electronic industry - Arsine
电子工业用气体 砷化氢
Application Summary AI generated
GB/T 26250-2010 specifies the technical requirements, test methods, inspection rules, and packaging for arsine gas used in the electronics industry. It is applied in the manufacturing of semiconductor devices, such as ion implantation and chemical vapor deposition processes, where high-purity arsine is essential for doping silicon wafers. The standard ensures consistent quality and safety in handling this toxic gas for microelectronics production.
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Transparency note: The application summary and key sentences on this page were automatically generated by AI from the standard's original text. This content has not been human-verified and should not be used for compliance or regulatory purposes. Always refer to the official standard document from the issuing authority.