GB/T 25755-2010
ActiveVacuum technology - Sputter-ion pumps - Measurement of performance characteristics
真空技术 溅射离子泵 性能参数的测量
Application Summary AI generated
This standard specifies the methods for measuring the performance characteristics of sputter-ion pumps, including parameters such as pumping speed, ultimate pressure, and starting pressure. It is applied in the vacuum technology industry, specifically for testing and evaluating sputter-ion pumps used in high-vacuum and ultra-high-vacuum systems, such as those in semiconductor manufacturing, particle accelerators, and scientific research equipment.
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Transparency note: The application summary and key sentences on this page were automatically generated by AI from the standard's original text. This content has not been human-verified and should not be used for compliance or regulatory purposes. Always refer to the official standard document from the issuing authority.