GB/T 21287-2007

Abolished

Gases for electronic industry - Nitrogen trifluoride

电子工业用气体三氟化氮

Standard Type

GBT

ICS

71.100.20

CCS

G86

Status

Abolished

Issue Date

2007-12-14

Implementation

2008-07-01

Centralized Committee

国家标准委

Issuing Authority

中华人民共和国国家质量监督检验检疫总局、中国国家标准化管理委员会

Application Summary AI generated

This standard specifies the technical requirements, test methods, inspection rules, and packaging, marking, storage, and transportation of nitrogen trifluoride (NF₃) used in the electronics industry. It is applied in the manufacturing of semiconductors, flat panel displays, and photovoltaic cells, where NF₃ serves as a cleaning and etching gas for chemical vapor deposition (CVD) chambers. The standard ensures the gas meets purity and impurity limits critical for preventing contamination during high-precision electronic device fabrication.

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Transparency note: The application summary and key sentences on this page were automatically generated by AI from the standard's original text. This content has not been human-verified and should not be used for compliance or regulatory purposes. Always refer to the official standard document from the issuing authority.