GB/T 18994-2014

This standard specifies the technical requirements, test methods, inspection rules, and packaging, marking, storage, and transportation conditions for high-purity chlorine gas used in the electronics industry. It is applied in the manufacturing of semiconductor devices, integrated circuits, and photovoltaic products, where high-purity chlorine serves as a critical etching and cleaning agent in chemical vapor deposition and plasma etching processes. The standard ensures the gas meets stringent purity levels (typically ≥99.999%) to prevent contamination and defects in microelectronic components.