GB/T 18867-2014

This standard specifies the technical requirements, test methods, inspection rules, and packaging, marking, storage, and transportation conditions for sulphur hexafluoride (SF6) gas used in the electronics industry. It is primarily applied in the manufacturing of semiconductors, integrated circuits, and flat-panel displays, where SF6 serves as an etching gas and cleaning agent in plasma processes. The standard ensures high purity and low impurity levels to prevent contamination and defects in sensitive electronic components.