GB/T 17874-2010

This standard specifies the technical requirements, test methods, inspection rules, and packaging, marking, storage, and transportation of boron trichloride (BCl₃) used in the electronics industry. It is primarily applied in the manufacturing of semiconductor devices, integrated circuits, and optical fibers, where high-purity BCl₃ serves as an etching gas, dopant source, or cleaning agent in chemical vapor deposition (CVD) processes. The standard ensures product purity and consistency for critical electronic material applications.