GB/T 16943-2009

Abolished

Gas for electronic industry - Helium

电子工业用气体氦

Standard Type

GBT

ICS

71.100.20

CCS

G86

Status

Abolished

Issue Date

2009-10-30

Implementation

2010-05-01

Centralized Committee

国家标准委

Issuing Authority

中华人民共和国国家质量监督检验检疫总局、中国国家标准化管理委员会

Application Summary AI generated

GB/T 16943-2009 specifies the technical requirements, test methods, inspection rules, and packaging for high-purity helium used in the electronics industry. It is applied in semiconductor manufacturing, integrated circuit production, and other microelectronics processes where helium serves as a carrier gas, cooling medium, or plasma etching agent. The standard ensures consistent gas purity and safety for critical fabrication steps in cleanroom environments.

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Transparency note: The application summary and key sentences on this page were automatically generated by AI from the standard's original text. This content has not been human-verified and should not be used for compliance or regulatory purposes. Always refer to the official standard document from the issuing authority.