GB/T 16942-2009
AbolishedHydrogen for electronic industry
电子工业用气体 氢
Application Summary AI generated
GB/T 16942-2009 specifies the technical requirements, test methods, inspection rules, and packaging for high-purity hydrogen gas used in the electronic industry. It is applied in semiconductor manufacturing, integrated circuit production, and other microelectronics processes where hydrogen serves as a carrier gas, reducing agent, or etching gas. The standard ensures the gas meets strict purity levels to prevent contamination during sensitive fabrication steps.
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Transparency note: The application summary and key sentences on this page were automatically generated by AI from the standard's original text. This content has not been human-verified and should not be used for compliance or regulatory purposes. Always refer to the official standard document from the issuing authority.