GB/T 16942-2009

Abolished

Hydrogen for electronic industry

电子工业用气体 氢

Standard Type
GBT
ICS
71.100.20
CCS
G86
Status
Abolished
Issue Date
2009-10-30
Implementation
2010-05-01
Centralized Committee
国家标准委
Issuing Authority
中华人民共和国国家质量监督检验检疫总局、中国国家标准化管理委员会

Application Summary AI generated

GB/T 16942-2009 specifies the technical requirements, test methods, inspection rules, and packaging for high-purity hydrogen gas used in the electronic industry. It is applied in semiconductor manufacturing, integrated circuit production, and other microelectronics processes where hydrogen serves as a carrier gas, reducing agent, or etching gas. The standard ensures the gas meets strict purity levels to prevent contamination during sensitive fabrication steps.

Related Standards

Transparency note: The application summary and key sentences on this page were automatically generated by AI from the standard's original text. This content has not been human-verified and should not be used for compliance or regulatory purposes. Always refer to the official standard document from the issuing authority.