GB/T 15909-2017
ActiveGas for electronic industry—Silane
电子工业用气体 硅烷
Application Summary AI generated
GB/T 15909-2017 specifies the technical requirements, test methods, inspection rules, and packaging, marking, storage, and transportation conditions for silane gas used in the electronics industry. It is applied in the production of semiconductor devices, solar cells, and flat-panel displays where high-purity silane is required as a silicon source for chemical vapor deposition (CVD) processes. The standard ensures consistent gas quality for critical thin-film deposition steps in cleanroom manufacturing environments.
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Transparency note: The application summary and key sentences on this page were automatically generated by AI from the standard's original text. This content has not been human-verified and should not be used for compliance or regulatory purposes. Always refer to the official standard document from the issuing authority.