GB/T 15909-2017

Active

Gas for electronic industry—Silane

电子工业用气体 硅烷

Standard Type
GBT
ICS
71.100.20
CCS
G86
Status
Active
Issue Date
2017-05-31
Implementation
2017-12-01
Centralized Committee
国家标准委
Issuing Authority
中华人民共和国国家质量监督检验检疫总局、中国国家标准化管理委员会

Application Summary AI generated

GB/T 15909-2017 specifies the technical requirements, test methods, inspection rules, and packaging, marking, storage, and transportation conditions for silane gas used in the electronics industry. It is applied in the production of semiconductor devices, solar cells, and flat-panel displays where high-purity silane is required as a silicon source for chemical vapor deposition (CVD) processes. The standard ensures consistent gas quality for critical thin-film deposition steps in cleanroom manufacturing environments.

Related Standards

Transparency note: The application summary and key sentences on this page were automatically generated by AI from the standard's original text. This content has not been human-verified and should not be used for compliance or regulatory purposes. Always refer to the official standard document from the issuing authority.