GB/T 15909-2009

Abolished

Gas for electronic industry - Silane

电子工业用气体 硅烷(SiH4)

Standard Type
GBT
ICS
71.100.20
CCS
G86
Status
Abolished
Issue Date
2009-10-30
Implementation
2010-05-01
Centralized Committee
国家标准委
Issuing Authority
中华人民共和国国家质量监督检验检疫总局、中国国家标准化管理委员会

Application Summary AI generated

GB/T 15909-2009 specifies the technical requirements, test methods, inspection rules, and packaging for silane (SiH4) gas used in the electronics industry. It is applied in the production of semiconductor devices, solar cells, and flat-panel displays, where high-purity silane is essential for chemical vapor deposition (CVD) processes to deposit silicon films. The standard ensures consistent gas quality for critical manufacturing steps in microelectronics and photovoltaic fabrication.

Related Standards

Transparency note: The application summary and key sentences on this page were automatically generated by AI from the standard's original text. This content has not been human-verified and should not be used for compliance or regulatory purposes. Always refer to the official standard document from the issuing authority.