GB/T 14851-2009
AbolishedGas for electronic industry - Phosphine
电子工业用气体 磷化氢
Application Summary AI generated
This standard specifies the technical requirements, test methods, inspection rules, and packaging, marking, storage, and transportation of phosphine gas used in the electronics industry. It is applied to high-purity phosphine as a doping gas or chemical vapor deposition (CVD) source in the manufacturing of semiconductors, integrated circuits, and optoelectronic devices. The standard ensures the gas meets the stringent purity and safety levels required for critical electronic material processing.
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Transparency note: The application summary and key sentences on this page were automatically generated by AI from the standard's original text. This content has not been human-verified and should not be used for compliance or regulatory purposes. Always refer to the official standard document from the issuing authority.