GB/T 14604-2009

Abolished

Gas for electronic industry - Oxygen

电子工业用气体 氧

Standard Type
GBT
ICS
71.100.20
CCS
G86
Status
Abolished
Issue Date
2009-10-30
Implementation
2010-05-01
Centralized Committee
国家标准委
Issuing Authority
中华人民共和国国家质量监督检验检疫总局、中国国家标准化管理委员会

Application Summary AI generated

GB/T 14604-2009 specifies the technical requirements, test methods, inspection rules, and packaging for high-purity oxygen used in the electronics industry. It is applied in semiconductor manufacturing, flat panel display production, and other microelectronics processes where oxygen is used for oxidation, etching, or as a carrier gas. The standard ensures the gas meets strict purity and contaminant limits critical for preventing defects in electronic components.

Related Standards

Transparency note: The application summary and key sentences on this page were automatically generated by AI from the standard's original text. This content has not been human-verified and should not be used for compliance or regulatory purposes. Always refer to the official standard document from the issuing authority.