GB/T 14603-2009

This standard specifies the technical requirements, test methods, inspection rules, and packaging, marking, storage, and transportation conditions for boron trifluoride gas used in the electronics industry. It is applied in the manufacturing of semiconductor devices, integrated circuits, and ion implantation processes, where high-purity boron trifluoride is required as a doping source or etching gas. The standard ensures the gas meets stringent purity and impurity limits critical for consistent electronic component performance.