GB/T 14602-2014
AbolishedGases for electronic industry—Hydrogen chloride
电子工业用气体 氯化氢
Application Summary AI generated
GB/T 14602-2014 specifies the technical requirements, test methods, inspection rules, and packaging for high-purity hydrogen chloride gas used in the electronics industry. It applies to the production and quality control of hydrogen chloride used as an etching gas, cleaning gas, or raw material for epitaxial growth in semiconductor manufacturing and integrated circuit fabrication. This standard ensures the gas meets the stringent purity and impurity limits required for critical electronic processes.
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Transparency note: The application summary and key sentences on this page were automatically generated by AI from the standard's original text. This content has not been human-verified and should not be used for compliance or regulatory purposes. Always refer to the official standard document from the issuing authority.