GB/T 14601-2009
AbolishedGas for electronic industry - Ammonia
电子工业用气体 氨
Application Summary AI generated
GB/T 14601-2009 specifies the technical requirements, test methods, inspection rules, and packaging for high-purity ammonia gas used in the electronics industry. It is applied in semiconductor manufacturing, flat-panel display production, and LED fabrication where ammonia serves as a nitrogen source for chemical vapor deposition (CVD) and nitridation processes. The standard ensures the gas meets strict purity and impurity limits to prevent contamination during critical thin-film deposition steps.
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Transparency note: The application summary and key sentences on this page were automatically generated by AI from the standard's original text. This content has not been human-verified and should not be used for compliance or regulatory purposes. Always refer to the official standard document from the issuing authority.