GB/T 14600-2009

This standard specifies the technical requirements, test methods, inspection rules, and packaging, marking, storage, and transportation of nitrous oxide (N₂O) used in the electronics industry. It is applied in the manufacturing of semiconductor devices, integrated circuits, and flat panel displays, where high-purity nitrous oxide serves as an oxidizing agent or dopant source in chemical vapor deposition (CVD) processes. The standard ensures the gas meets strict purity and impurity limits necessary for reliable and consistent electronic component production.